Optical Grade Calcium Fluoride (CaF2) Lenses and Windows

Optical Grade Calcium Fluoride (CaF2) Lenses and Windows

Calcium Fluoride (CaF₂) is an important optical crystal material widely used in the optical field due to its ultra-broad transmission range from deep ultraviolet (DUV) to mid-infrared (MIR). Calcium fluoride exhibits no significant intrinsic birefringence above 200nm, making it suitable for high-precision polarization optical systems. With low dispersion, high laser-induced damage threshold, and low absorption, it can withstand relatively high-power laser irradiation. It is an ideal material for projection objective lenses and illumination windows in DUV lithography systems, as well as an essential material for high-power UV lasers and excimer laser optics.

Depending on the application scenario, calcium fluoride can be fabricated into various optical components including beam-splitting prisms, windows, and lenses.

 

Transmission Range: 0.13μm (DUV) ~ 9μm (MIR)

UV Region (<200nm): Transmittance up to >90%, superior to fused silica

IR Region (3-5μm): Transmittance >95%, suitable for thermal imaging systems

Refractive Index: Low and low dispersion (n=1.43 @200nm, n=1.40 @5μm), ideal for broadband anti-reflective coating design


Product Detail

Product Tags

Parameter Standard Precision High Precision
Shape / Product Plano lens, wedge window, beam splitter, UV laser objective Windows, plano-convex, plano-concave, biconvex, biconcave, spherical, aspherical, right-angle prism, equilateral dispersion prism, cylindrical
Design Wavelength 0.18 – 8μm high transmission
Dimension Range 10mm – 80mm
Dimension Tolerance ±0.1mm ±0.025mm ±0.01mm
Thickness Tolerance ±0.1mm ±0.025mm ±0.01mm

Applications

1.DUV Lithography Systems Excimer-grade CaF₂ is used in 193nm lithography objective lenses and excimer laser output windows for semiconductor nano-patterning, featuring low absorption and high homogeneity to withstand high-intensity laser radiation.
2.IR & UV Imaging Systems IR-grade CaF₂ lenses provide high transmittance at 3–5 μm for infrared thermal imaging for security and reconnaissance. VUV-grade CaF₂ transmits >130nm vacuum UV, suitable for UV fluorescence microscopy and space EUV imaging.
3.Interferometers & Spectrometers CaF₂’s low dispersion and excellent homogeneity enable accurate optical surface testing. As prisms and windows, its wide UV-IR transmission improves spectral measurement precision.


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