| Parameter | Standard | Precision | High Precision |
| Shape / Product | Plano lens, wedge window, beam splitter, UV laser objective | Windows, plano-convex, plano-concave, biconvex, biconcave, spherical, aspherical, right-angle prism, equilateral dispersion prism, cylindrical | — |
| Design Wavelength | 0.18 – 8μm high transmission | — | — |
| Dimension Range | 10mm – 80mm | — | — |
| Dimension Tolerance | ±0.1mm | ±0.025mm | ±0.01mm |
| Thickness Tolerance | ±0.1mm | ±0.025mm | ±0.01mm |
Applications
1.DUV Lithography Systems Excimer-grade CaF₂ is used in 193nm lithography objective lenses and excimer laser output windows for semiconductor nano-patterning, featuring low absorption and high homogeneity to withstand high-intensity laser radiation.
2.IR & UV Imaging Systems IR-grade CaF₂ lenses provide high transmittance at 3–5 μm for infrared thermal imaging for security and reconnaissance. VUV-grade CaF₂ transmits >130nm vacuum UV, suitable for UV fluorescence microscopy and space EUV imaging.
3.Interferometers & Spectrometers CaF₂’s low dispersion and excellent homogeneity enable accurate optical surface testing. As prisms and windows, its wide UV-IR transmission improves spectral measurement precision.
Wavelength has been focused on providing high precision optical products for 20 years